Lab Facility and Resources

• Software license: COMSOL Multiphysics, Advance Design System, Solidworks , ANSYS/ANSYS HFSS, MATLAB R2019a.
• Flexstream gas standard generator for gas sensing applications.
• Nanomaterial and Sensors Laboratory (NMSL) for testing and characterization of flexible electronics, antennas and sensors.
• A certified class 100 Clean room (1800 square feet) divided into 3 equal size rooms connected by a clean hallway.
• Scanning Electron Microscope (SEM) for better characterization of the fabricated electronics.

 

 

MICROFABRICATION FACILITIES

Material Deposition

               

      Physical Vapor Deposition- Sputtering Nano36   ||  E-Beam Evaporator

    Chemical Vapor Deposition

Atomic Layer Deposition

Patterning

                                                                                   Optical Lithography

 

                                       

                        Spin Coater (CEE 200)                                                               Spin Coater (LAURELL 650M)

Etching

                            

                                                                                                  Fume Hood

      

Wet Etch Bench                                                                   Oxygen Plasma