Micro/Nano Technology track
The courses in this group provide education in basic semiconductor concepts such as energy bandgap and charge carriers, semiconductor devices, microelectronic fabrication technology, nano-science and its impact on design of the next generation engineering systems. Some of regional employers in the micro/nano industry include Intel, SEH America, WaferTech, Maxim Integrated, HP, and FEI.
1. MECH 431 Semiconductor Devices (Spring Jr. or Sr. Yr.)
This course focuses on understanding the fundamental principles of semiconductor devices, including crystal properties, energy bands, semiconductor charge carriers, p-n junctions, field-effect transistors, bipolar junction transistors, optoelectronic devices, and integrated circuits.
2. MECH 438/538 Microfabrication Technology (Fall Jr. or Sr. Yr.)
This course focuses on understanding the fundamental principles of the manufacturing processes used in the fabrication of devices for silicon integrated circuits. This includes physical models, practical aspects of major processes, and process integration to yield arbitrary devices. Although the emphasis in this course is on transistor devices, many of the methods to be taught are also applicable to MEMS and other micro-devices.
3. MECH 450/550 Advanced Topics in Micro and Nano Technology (Spring Jr. or Sr. Yr.)
This course focuses on learning the concepts of nano scale materials, nanofabrication, and nanodevices. Hands-on experience of microfabrication to better understand the manufacturing processes and micro/nano device measurements.
4. MECH 453 Sensor Technology (Spring Jr. or Sr. Yr.)
This course introduces the variety of sensors used in engineering practice and in many modern applications, including mechanical/electrical, bio/chemical, and micro/wearable systems. This course will include a comprehensive description of the fundamental operation principles of sensors and highlight how these principles impact the use of sensors for applications. ‘Sensor technology’ gives a comprehensive overview of common practice and includes some indication of the directions in which sensor technologies are heading.
5. MECH 509 MEMS Engineering (Graduate student)
Micro Electro Mechanical Systems (MEMS) are miniature devices (with micron-size tolerances) that are created using various techniques, including many similar to those used to manufacture integrated circuits, and are capable of performing many tasks and functions that involve mechanical, electrical, optical, chemical, bio, fluidic, and other types of signals. This course introduces students to this rapidly emerging, multi-disciplinary, and exciting field. It will cover the fundamentals of micromachining and microfabrication techniques. Additionally, the fundamentals of sensing and transduction mechanisms using these techniques will be explored.